● Multi Chamber DIO3 supply；

● Dissolved Ozone Water concentration：5-100ppm；

● Constant ozone concentration and operating pressure at varying flow rates;

● Dissolved O3 water monitor intergrated;

● Ultra clean for Semiconductor process;  

● Close loop DIO3 concentration controlling system;

● Gas-liquid separation unit intergrated, bubble free ozone water;

● High efficiency ozone contactor;

● SEMI-S2 and CE Certification;

● Application：Cleaning, surface conditioning,Etching