● Cold plasma ozone technology, double side cooling ozone cell;

● High ozone concentration, Max 350g/m3;

● High delivery Ozone pressure; up to 3 bar;

● Flow rate: ≥5slm@300g/m3@3cells；

● Power mode and Flow mode output;

● Integrated gas pressure regulator and MFC;

● Integrated High accuracy ozone gas analyzer;   

● MES: Remote I/O, Modbus TCP；

● Buffer tank and High efficiency Ozone Destructor integrated; 

● SEMI-S2 and CE Certification;